Issued Patents 2016
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9510434 | Extreme ultraviolet light generating apparatus, method of generating extreme ultraviolet light, concentrated pulsed laser light beam measuring apparatus, and method of measuring concentrated pulsed laser light beam | Yasufumi Kawasuji, Osamu Wakabayashi | 2016-11-29 |
| 9507248 | Two-beam interference apparatus and two-beam interference exposure system | Shinji Okazaki, Junichi Fujimoto, Takashi Matsunaga, Kouji Kakizaki, Osamu Wakabayashi | 2016-11-29 |
| 9497842 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi | 2016-11-15 |
| 9465307 | Cleaning method for EUV light generation apparatus | Shinji Nagai | 2016-10-11 |
| 9402297 | Extreme ultraviolet light generation system | Osamu Wakabayashi, Tatsuya Yanagida | 2016-07-26 |
| 9373926 | Laser chamber and discharge excitation gas laser apparatus | Hiroaki TSUSHIMA, Junichi Fujimoto, Hiroaki Nakarai, Natsushi Suzuki | 2016-06-21 |
| 9362703 | Optical device, laser apparatus, and extreme ultraviolet light generation system | Takashi Suganuma, Hideo Hoshino, Osamu Wakabayashi | 2016-06-07 |
| 9331450 | Laser apparatus | Takeshi Asayama, Kouji Kakizaki, Hiroaki TSUSHIMA, Osamu Wakabayashi, Kazuya Takezawa | 2016-05-03 |
| 9265136 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi | 2016-02-16 |