Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9510433 | Extreme ultraviolet light generation apparatus | Tamotsu Abe, Hitoshi Nagano, Osamu Wakabayashi | 2016-11-29 |
| 9465307 | Cleaning method for EUV light generation apparatus | Hakaru Mizoguchi | 2016-10-11 |