Issued Patents 2016
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9510434 | Extreme ultraviolet light generating apparatus, method of generating extreme ultraviolet light, concentrated pulsed laser light beam measuring apparatus, and method of measuring concentrated pulsed laser light beam | Hakaru Mizoguchi, Yasufumi Kawasuji | 2016-11-29 |
| 9510433 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Tamotsu Abe, Hitoshi Nagano | 2016-11-29 |
| 9509115 | System and method for generating extreme ultraviolet light, and laser apparatus | Tatsuya Yanagida | 2016-11-29 |
| 9507248 | Two-beam interference apparatus and two-beam interference exposure system | Shinji Okazaki, Hakaru Mizoguchi, Junichi Fujimoto, Takashi Matsunaga, Kouji Kakizaki | 2016-11-29 |
| 9497841 | Extreme ultraviolet light generation system | Tatsuya Yanagida | 2016-11-15 |
| 9497842 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Hakaru Mizoguchi | 2016-11-15 |
| 9490603 | Laser apparatus and method of controlling laser apparatus | Hiroaki TSUSHIMA, Takahito Kumazaki, Takashi Matsunaga | 2016-11-08 |
| 9468082 | Extreme ultraviolet light generation apparatus and control method for laser apparatus in extreme ultraviolet light generation system | Hideyuki Hayashi, Kazuhiro Suzuki | 2016-10-11 |
| 9439276 | Extreme ultraviolet light generating system | Takayuki Yabu, Takashi Saito | 2016-09-06 |
| 9439275 | System and method for generating extreme ultraviolet light | Masato Moriya | 2016-09-06 |
| 9429847 | Extreme ultraviolet light source apparatus | Toshihiro Nishisaka, Yukio Watanabe, Kouji Kakizaki, Michio Shinozaki | 2016-08-30 |
| 9425576 | Excimer laser apparatus and excimer laser system | Tooru Abe, Takeshi Ohta, Hiroaki TSUSHIMA | 2016-08-23 |
| 9407052 | Amplifier, laser apparatus, and extreme ultraviolet light generation system | Krzysztof Nowak | 2016-08-02 |
| 9402297 | Extreme ultraviolet light generation system | Tatsuya Yanagida, Hakaru Mizoguchi | 2016-07-26 |
| 9386675 | Laser beam controlling device and extreme ultraviolet light generating apparatus | Toru Suzuki | 2016-07-05 |
| 9363878 | Device for controlling laser beam and apparatus for generating extreme ultraviolet light utilizing wavefront adjusters | Masato Moriya | 2016-06-07 |
| 9362703 | Optical device, laser apparatus, and extreme ultraviolet light generation system | Hakaru Mizoguchi, Takashi Suganuma, Hideo Hoshino | 2016-06-07 |
| 9351388 | Target generation device and extreme ultraviolet light generation apparatus | Masaki Nakano | 2016-05-24 |
| 9350133 | Method of controlling laser apparatus and laser apparatus | Hiroaki TSUSHIMA, Kouji Kakizaki | 2016-05-24 |
| 9331450 | Laser apparatus | Takeshi Asayama, Hakaru Mizoguchi, Kouji Kakizaki, Hiroaki TSUSHIMA, Kazuya Takezawa | 2016-05-03 |
| 9332625 | Extreme ultraviolet light source apparatus | Toshihiro Nishisaka, Yukio Watanabe, Kouji Kakizaki, Michio Shinozaki | 2016-05-03 |
| 9325150 | Alignment system and extreme ultraviolet light generation system | Masato Moriya | 2016-04-26 |
| 9318864 | Laser beam output control with optical shutter | Krzysztof Nowak, Hideo Hoshino | 2016-04-19 |
| 9277635 | Method for generating extreme ultraviolet light and device for generating extreme ultraviolet light | Masato Moriya, Hideyuki Hayashi | 2016-03-01 |
| 9271382 | Laser apparatus and extreme ultraviolet light generation apparatus | Masato Moriya | 2016-02-23 |