Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9509115 | System and method for generating extreme ultraviolet light, and laser apparatus | Osamu Wakabayashi | 2016-11-29 |
| 9497841 | Extreme ultraviolet light generation system | Osamu Wakabayashi | 2016-11-15 |
| 9497842 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Osamu Wakabayashi, Hakaru Mizoguchi | 2016-11-15 |
| 9402297 | Extreme ultraviolet light generation system | Osamu Wakabayashi, Hakaru Mizoguchi | 2016-07-26 |
| 9265136 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Osamu Wakabayashi, Hakaru Mizoguchi | 2016-02-16 |