Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507248 | Two-beam interference apparatus and two-beam interference exposure system | Shinji Okazaki, Hakaru Mizoguchi, Junichi Fujimoto, Takashi Matsunaga, Osamu Wakabayashi | 2016-11-29 |
| 9497842 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2016-11-15 |
| 9429847 | Extreme ultraviolet light source apparatus | Toshihiro Nishisaka, Yukio Watanabe, Osamu Wakabayashi, Michio Shinozaki | 2016-08-30 |
| 9350133 | Method of controlling laser apparatus and laser apparatus | Osamu Wakabayashi, Hiroaki TSUSHIMA | 2016-05-24 |
| 9332625 | Extreme ultraviolet light source apparatus | Toshihiro Nishisaka, Yukio Watanabe, Osamu Wakabayashi, Michio Shinozaki | 2016-05-03 |
| 9331450 | Laser apparatus | Takeshi Asayama, Hakaru Mizoguchi, Hiroaki TSUSHIMA, Osamu Wakabayashi, Kazuya Takezawa | 2016-05-03 |
| 9265136 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2016-02-16 |