Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9429847 | Extreme ultraviolet light source apparatus | Toshihiro Nishisaka, Yukio Watanabe, Osamu Wakabayashi, Kouji Kakizaki | 2016-08-30 |
| 9332625 | Extreme ultraviolet light source apparatus | Toshihiro Nishisaka, Yukio Watanabe, Osamu Wakabayashi, Kouji Kakizaki | 2016-05-03 |