Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9429847 | Extreme ultraviolet light source apparatus | Yukio Watanabe, Osamu Wakabayashi, Kouji Kakizaki, Michio Shinozaki | 2016-08-30 |
| 9332625 | Extreme ultraviolet light source apparatus | Yukio Watanabe, Osamu Wakabayashi, Kouji Kakizaki, Michio Shinozaki | 2016-05-03 |
| 9233782 | Target supply device | Takanobu Ishihara, Hiroshi Someya, Osamu Wakabayashi | 2016-01-12 |