Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9253866 | Gas lock device and extreme ultraviolet light generation apparatus | Hideto Saito | 2016-02-02 |
| 9233782 | Target supply device | Takanobu Ishihara, Toshihiro Nishisaka, Osamu Wakabayashi | 2016-01-12 |
| 9229192 | Mirror device | Yukio Watanabe, Katsuhiko Wakana, Osamu Wakabayashi | 2016-01-05 |