Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9497842 | System and method for generating extreme ultraviolet light | Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2016-11-15 |
| 9265136 | System and method for generating extreme ultraviolet light | Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2016-02-16 |