Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9439275 | System and method for generating extreme ultraviolet light | Osamu Wakabayashi | 2016-09-06 |
| 9363878 | Device for controlling laser beam and apparatus for generating extreme ultraviolet light utilizing wavefront adjusters | Osamu Wakabayashi | 2016-06-07 |
| 9325150 | Alignment system and extreme ultraviolet light generation system | Osamu Wakabayashi | 2016-04-26 |
| 9301379 | Extreme ultraviolet light generation apparatus | Yukio Watanabe, Miwa Igarashi, Hiroaki Nakarai | 2016-03-29 |
| 9277635 | Method for generating extreme ultraviolet light and device for generating extreme ultraviolet light | Hideyuki Hayashi, Osamu Wakabayashi | 2016-03-01 |
| 9271382 | Laser apparatus and extreme ultraviolet light generation apparatus | Osamu Wakabayashi | 2016-02-23 |