Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373926 | Laser chamber and discharge excitation gas laser apparatus | Hiroaki TSUSHIMA, Hakaru Mizoguchi, Junichi Fujimoto, Natsushi Suzuki | 2016-06-21 |
| 9301379 | Extreme ultraviolet light generation apparatus | Yukio Watanabe, Miwa Igarashi, Masato Moriya | 2016-03-29 |