Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9407052 | Amplifier, laser apparatus, and extreme ultraviolet light generation system | Osamu Wakabayashi | 2016-08-02 |
| 9318864 | Laser beam output control with optical shutter | Osamu Wakabayashi, Hideo Hoshino | 2016-04-19 |