Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362703 | Optical device, laser apparatus, and extreme ultraviolet light generation system | Hakaru Mizoguchi, Takashi Suganuma, Osamu Wakabayashi | 2016-06-07 |
| 9318864 | Laser beam output control with optical shutter | Krzysztof Nowak, Osamu Wakabayashi | 2016-04-19 |