Issued Patents 2016
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9265136 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Hakaru Mizoguchi | 2016-02-16 |
| 9257809 | Laser device for exposure apparatus | Hidenori Watanabe, Hiroshi Tanaka | 2016-02-09 |
| 9233782 | Target supply device | Takanobu Ishihara, Toshihiro Nishisaka, Hiroshi Someya | 2016-01-12 |
| 9229192 | Mirror device | Hiroshi Someya, Yukio Watanabe, Katsuhiko Wakana | 2016-01-05 |