Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9257809 | Laser device for exposure apparatus | Hiroshi Tanaka, Osamu Wakabayashi | 2016-02-09 |
| 9248445 | Method for making probe support and apparatus used for the method | Tadashi Okamoto, Nobuko Yamamoto, Tomohiro Suzuki | 2016-02-02 |