Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9257274 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Shankar Swaminathan, Jun Qian, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2016-02-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9257274 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Shankar Swaminathan, Jun Qian, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2016-02-09 |