Issued Patents 2016
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508547 | Composition-matched curtain gas mixtures for edge uniformity modulation in large-volume ALD reactors | Frank L. Pasquale, Chloe Baldasseroni, Edward Augustyniak, Yukinori Sakiyama | 2016-11-29 |
| 9460915 | Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges | Sesha Varadarajan, Saangrut Sangplung, Frank L. Pasquale, Ted Minshall, Adrien LaVoie +2 more | 2016-10-04 |
| 9390909 | Soft landing nanolaminates for advanced patterning | Frank L. Pasquale, Adrien LaVoie, Nader Shamma, Girish Dixit | 2016-07-12 |
| 9373500 | Plasma assisted atomic layer deposition titanium oxide for conformal encapsulation and gapfill applications | Frank L. Pasquale, Adrien LaVoie | 2016-06-21 |
| 9355886 | Conformal film deposition for gapfill | Bart J. van Schravendijk, Adrien LaVoie, Sesha Varadarajan, Jason D. Park, Michal Danek +1 more | 2016-05-31 |
| 9355839 | Sub-saturated atomic layer deposition and conformal film deposition | Hu Kang, Adrien LaVoie | 2016-05-31 |
| 9287113 | Methods for depositing films on sensitive substrates | Hu Kang, Adrien LaVoie, Jon Henri | 2016-03-15 |
| 9257274 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Jun Qian, Wanki Kim, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2016-02-09 |
| 9230800 | Plasma activated conformal film deposition | Adrien LaVoie, Hu Kang, Ramesh Chandrasekharan, Tom Dorsh, Dennis M. Hausmann +9 more | 2016-01-05 |