Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508547 | Composition-matched curtain gas mixtures for edge uniformity modulation in large-volume ALD reactors | Chloe Baldasseroni, Edward Augustyniak, Yukinori Sakiyama, Shankar Swaminathan | 2016-11-29 |
| 9460915 | Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges | Sesha Varadarajan, Shankar Swaminathan, Saangrut Sangplung, Ted Minshall, Adrien LaVoie +2 more | 2016-10-04 |
| 9390909 | Soft landing nanolaminates for advanced patterning | Shankar Swaminathan, Adrien LaVoie, Nader Shamma, Girish Dixit | 2016-07-12 |
| 9373500 | Plasma assisted atomic layer deposition titanium oxide for conformal encapsulation and gapfill applications | Shankar Swaminathan, Adrien LaVoie | 2016-06-21 |