Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508547 | Composition-matched curtain gas mixtures for edge uniformity modulation in large-volume ALD reactors | Frank L. Pasquale, Chloe Baldasseroni, Yukinori Sakiyama, Shankar Swaminathan | 2016-11-29 |
| 9449795 | Ceramic showerhead with embedded RF electrode for capacitively coupled plasma reactor | Mohamed Sabri, Douglas Keil, Ramkishan Rao Lingampalli, Karl Leeser, Cody Barnett | 2016-09-20 |
| 9404183 | Diagnostic and control systems and methods for substrate processing systems using DC self-bias voltage | Douglas Keil | 2016-08-02 |
| 9388494 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Chunguang Xia, Ramesh Chandrasekharan, Douglas Keil, Karl Leeser | 2016-07-12 |