Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490149 | Chemical deposition apparatus having conductance control | Ramesh Chandrasekharan, Karl Leeser, Jeremy Tucker | 2016-11-08 |
| 9388494 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Ramesh Chandrasekharan, Douglas Keil, Edward Augustyniak, Karl Leeser | 2016-07-12 |