Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508547 | Composition-matched curtain gas mixtures for edge uniformity modulation in large-volume ALD reactors | Frank L. Pasquale, Chloe Baldasseroni, Edward Augustyniak, Shankar Swaminathan | 2016-11-29 |