Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460915 | Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges | Sesha Varadarajan, Shankar Swaminathan, Saangrut Sangplung, Frank L. Pasquale, Ted Minshall +2 more | 2016-10-04 |
| 9449795 | Ceramic showerhead with embedded RF electrode for capacitively coupled plasma reactor | Edward Augustyniak, Douglas Keil, Ramkishan Rao Lingampalli, Karl Leeser, Cody Barnett | 2016-09-20 |
| 9441296 | Hybrid ceramic showerhead | Ramkishan Rao Lingampalli, Karl Leeser | 2016-09-13 |