Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460915 | Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges | Sesha Varadarajan, Shankar Swaminathan, Saangrut Sangplung, Frank L. Pasquale, Adrien LaVoie +2 more | 2016-10-04 |