Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460915 | Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges | Shankar Swaminathan, Saangrut Sangplung, Frank L. Pasquale, Ted Minshall, Adrien LaVoie +2 more | 2016-10-04 |
| 9355886 | Conformal film deposition for gapfill | Shankar Swaminathan, Bart J. van Schravendijk, Adrien LaVoie, Jason D. Park, Michal Danek +1 more | 2016-05-31 |