Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9390909 | Soft landing nanolaminates for advanced patterning | Frank L. Pasquale, Shankar Swaminathan, Adrien LaVoie, Girish Dixit | 2016-07-12 |
| 9362133 | Method for forming a mask by etching conformal film on patterned ashable hardmask | Bart J. van Schravendijk, Sirish Reddy, Chunhai Ji | 2016-06-07 |
| 9304396 | PECVD films for EUV lithography | Thomas W. Mountsier, Don Schlosser | 2016-04-05 |