Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418889 | Selective formation of dielectric barriers for metal interconnects in semiconductor devices | Hui-Jung Wu, Bhadri N. Varadarajan, Nagraj Shankar, William T. Lee | 2016-08-16 |
| 9379210 | Sacrificial pre-metal dielectric for self-aligned contact scheme | Bart J. van Schravendijk, Ananda Banerji, Nagraj Shankar | 2016-06-28 |
| 9304396 | PECVD films for EUV lithography | Nader Shamma, Don Schlosser | 2016-04-05 |
| 9230800 | Plasma activated conformal film deposition | Adrien LaVoie, Shankar Swaminathan, Hu Kang, Ramesh Chandrasekharan, Tom Dorsh +9 more | 2016-01-05 |