Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418889 | Selective formation of dielectric barriers for metal interconnects in semiconductor devices | Thomas W. Mountsier, Hui-Jung Wu, Nagraj Shankar, William T. Lee | 2016-08-16 |
| 9371579 | Ground state hydrogen radical sources for chemical vapor deposition of silicon-carbon-containing films | Bo Gong | 2016-06-21 |
| 9234276 | Method to obtain SiC class of films of desired composition and film properties | — | 2016-01-12 |