Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9371579 | Ground state hydrogen radical sources for chemical vapor deposition of silicon-carbon-containing films | Bhadri N. Varadarajan | 2016-06-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9371579 | Ground state hydrogen radical sources for chemical vapor deposition of silicon-carbon-containing films | Bhadri N. Varadarajan | 2016-06-21 |