Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418889 | Selective formation of dielectric barriers for metal interconnects in semiconductor devices | Thomas W. Mountsier, Hui-Jung Wu, Bhadri N. Varadarajan, William T. Lee | 2016-08-16 |
| 9399228 | Method and apparatus for purging and plasma suppression in a process chamber | Patrick Breiling, Kevin Gerber, Jennifer O'Loughlin, Pramod Subramonium | 2016-07-26 |
| 9379210 | Sacrificial pre-metal dielectric for self-aligned contact scheme | Thomas W. Mountsier, Bart J. van Schravendijk, Ananda Banerji | 2016-06-28 |