Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9399228 | Method and apparatus for purging and plasma suppression in a process chamber | Patrick Breiling, Kevin Gerber, Jennifer O'Loughlin, Nagraj Shankar | 2016-07-26 |
| 9240320 | Methods of depositing smooth and conformal ashable hard mask films | Zhiyuan Fang, Shawn Hancock, Mike Pierce, Jon Henri | 2016-01-19 |