Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9399228 | Method and apparatus for purging and plasma suppression in a process chamber | Kevin Gerber, Jennifer O'Loughlin, Nagraj Shankar, Pramod Subramonium | 2016-07-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9399228 | Method and apparatus for purging and plasma suppression in a process chamber | Kevin Gerber, Jennifer O'Loughlin, Nagraj Shankar, Pramod Subramonium | 2016-07-26 |