Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9240320 | Methods of depositing smooth and conformal ashable hard mask films | Pramod Subramonium, Zhiyuan Fang, Mike Pierce, Jon Henri | 2016-01-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9240320 | Methods of depositing smooth and conformal ashable hard mask films | Pramod Subramonium, Zhiyuan Fang, Mike Pierce, Jon Henri | 2016-01-19 |