Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362133 | Method for forming a mask by etching conformal film on patterned ashable hardmask | Nader Shamma, Bart J. van Schravendijk, Sirish Reddy | 2016-06-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362133 | Method for forming a mask by etching conformal film on patterned ashable hardmask | Nader Shamma, Bart J. van Schravendijk, Sirish Reddy | 2016-06-07 |