Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425078 | Inhibitor plasma mediated atomic layer deposition for seamless feature fill | Bart J. van Schravendijk, Jun Qian, Hu Kang, Adrien LaVoie, Deenesh Padhi +1 more | 2016-08-23 |
| 9406544 | Systems and methods for eliminating seams in atomic layer deposition of silicon dioxide film in gap fill applications | Jason D. Park, Bart J. van Schravendijk, Kaihan Ashtiani | 2016-08-02 |