Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9297073 | Accurate film thickness control in gap-fill technology | Ning Li, Wenbo Yan, Victor Nguyen, Mihaela Balseanu, Li-Qun Xia | 2016-03-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9297073 | Accurate film thickness control in gap-fill technology | Ning Li, Wenbo Yan, Victor Nguyen, Mihaela Balseanu, Li-Qun Xia | 2016-03-29 |