Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9458537 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2016-10-04 |
| 9428424 | Critical chamber component surface improvement to reduce chamber particles | Ren-Guan Duan, Juan Carlos Rocha-Alvarez | 2016-08-30 |
| 9299581 | Methods of dry stripping boron-carbon films | Kwangduk Douglas Lee, Sudha Rathi, Martin Jay Seamons, Irfan Jamil, Bok Hoen Kim | 2016-03-29 |