Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520314 | High temperature electrostatic chuck bonding adhesive | Jennifer Y. Sun, Senh Thach | 2016-12-13 |
| 9428424 | Critical chamber component surface improvement to reduce chamber particles | Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2016-08-30 |
| 9394615 | Plasma resistant ceramic coated conductive article | Jennifer Y. Sun, Biraja P. Kanungo, Hamid Noorbakhsh, Junhan Yuh, Dmitry Lubomirsky | 2016-07-19 |
| 9384950 | Chamber coatings | Juan Carlos Rocha-Alvarez, Jianhua Zhou, Ningli Liu, Yihong Chen, Abhijit Basu Mallick +1 more | 2016-07-05 |