| 9520314 |
High temperature electrostatic chuck bonding adhesive |
Senh Thach, Ren-Guan Duan |
2016-12-13 |
| 9447365 |
Enhanced cleaning process of chamber used plasma spray coating without damaging coating |
Sumanth Banda |
2016-09-20 |
| 9440886 |
Rare-earth oxide based monolithic chamber material |
Biraja P. Kanungo |
2016-09-13 |
| 9420639 |
Smart device fabrication via precision patterning |
Yikai Chen, Biraja P. Kanungo, Vahid Firouzdor |
2016-08-16 |
| 9394615 |
Plasma resistant ceramic coated conductive article |
Biraja P. Kanungo, Ren-Guan Duan, Hamid Noorbakhsh, Junhan Yuh, Dmitry Lubomirsky |
2016-07-19 |
| 9358702 |
Temperature management of aluminium nitride electrostatic chuck |
Sumanth Banda, Douglas A. Buchberger, Jr., Shane C. Nevil |
2016-06-07 |
| 9343289 |
Chemistry compatible coating material for advanced device on-wafer particle performance |
Biraja P. Kanungo, Dmitry Lubomirsky |
2016-05-17 |
| 9281226 |
Electrostatic chuck having reduced power loss |
Konstantin Makhratchev |
2016-03-08 |
