| 9499898 |
Layered thin film heater and method of fabrication |
Son T. Nguyen |
2016-11-22 |
| 9460898 |
Plasma generation chamber with smooth plasma resistant coating |
Sung Je Kim, Soonam Park |
2016-10-04 |
| 9449850 |
Processing systems and methods for halide scavenging |
Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more |
2016-09-20 |
| 9412579 |
Methods and apparatus for controlling substrate uniformity |
S. M. Reza Sadjadi, Hamid Noorbakhsh, John Zheng Ye, David H. Quach, Sean S. Kang |
2016-08-09 |
| 9394615 |
Plasma resistant ceramic coated conductive article |
Jennifer Y. Sun, Biraja P. Kanungo, Ren-Guan Duan, Hamid Noorbakhsh, Junhan Yuh |
2016-07-19 |
| 9362130 |
Enhanced etching processes using remote plasma sources |
Nitin K. Ingle, Xinglong Chen, Shankar Venkataraman |
2016-06-07 |
| 9355922 |
Systems and methods for internal surface conditioning in plasma processing equipment |
Soonam Park, Yufei Zhu, Edwin C. Suarez, Nitin K. Ingle, Jiayin Huang |
2016-05-31 |
| 9343289 |
Chemistry compatible coating material for advanced device on-wafer particle performance |
Jennifer Y. Sun, Biraja P. Kanungo |
2016-05-17 |
| 9299538 |
Radial waveguide systems and methods for post-match control of microwaves |
Satoru Kobayashi, Soonam Park |
2016-03-29 |
| 9299537 |
Radial waveguide systems and methods for post-match control of microwaves |
Satoru Kobayashi, Soonam Park, Hideo Sugai |
2016-03-29 |
| 9285168 |
Module for ozone cure and post-cure moisture treatment |
Jay D. Pinson, II, Kirby H. Floyd, Adib Khan, Shankar Venkataraman |
2016-03-15 |
