Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472417 | Plasma-free metal etch | Nitin K. Ingle, Jessica S. Kachian, Lin Xu, Xikun Wang, Jeffrey W. Anthis | 2016-10-18 |
| 9460898 | Plasma generation chamber with smooth plasma resistant coating | Sung Je Kim, Dmitry Lubomirsky | 2016-10-04 |
| 9384997 | Dry-etch selectivity | He Ren, Jang-Gyoo Yang, Jonghoon Baek, Anchuan Wang, Saurabh Garg +2 more | 2016-07-05 |
| 9373517 | Semiconductor processing with DC assisted RF power for improved control | Jang-Gyoo Yang, Xinglong Chen, Jonghoon Baek, Saurabh Garg, Shankar Venkataraman | 2016-06-21 |
| 9355922 | Systems and methods for internal surface conditioning in plasma processing equipment | Yufei Zhu, Edwin C. Suarez, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang | 2016-05-31 |
| 9299537 | Radial waveguide systems and methods for post-match control of microwaves | Satoru Kobayashi, Dmitry Lubomirsky, Hideo Sugai | 2016-03-29 |
| 9299582 | Selective etch for metal-containing materials | Nitin K. Ingle, Jessica S. Kachian, Lin Xu, Xikun Wang, Jeffrey W. Anthis | 2016-03-29 |
| 9299538 | Radial waveguide systems and methods for post-match control of microwaves | Satoru Kobayashi, Dmitry Lubomirsky | 2016-03-29 |