Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502218 | RPS assisted RF plasma source for semiconductor processing | Xinglong Chen, Saurabh Garg | 2016-11-22 |
| 9384997 | Dry-etch selectivity | He Ren, Jonghoon Baek, Anchuan Wang, Soonam Park, Saurabh Garg +2 more | 2016-07-05 |
| 9373517 | Semiconductor processing with DC assisted RF power for improved control | Xinglong Chen, Soonam Park, Jonghoon Baek, Saurabh Garg, Shankar Venkataraman | 2016-06-21 |
| 9267739 | Pedestal with multi-zone temperature control and multiple purge capabilities | Xinglong Chen, Alexander Tam, Elisha Tam | 2016-02-23 |