Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384997 | Dry-etch selectivity | He Ren, Jang-Gyoo Yang, Anchuan Wang, Soonam Park, Saurabh Garg +2 more | 2016-07-05 |
| 9373517 | Semiconductor processing with DC assisted RF power for improved control | Jang-Gyoo Yang, Xinglong Chen, Soonam Park, Saurabh Garg, Shankar Venkataraman | 2016-06-21 |