Xinglong Chen — 8 Patents at Applied Materials

Issued Patents 2016

Showing 1–8 of 8 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
9524889	Processing systems and apparatus adapted to process substrates in electronic device manufacturing	Steve Hongkham, Paul B. Reuter, Eric A. Englhardt, Ganesh Balasubramanian, JuanCarlos Rocha-Alvarez	2016-12-20	$108,070,000
9520301	Etching method using plasma, and method of fabricating semiconductor device including the etching method	Go-jun Kim, Vladimir Volynets, Sang Jin An, Hee-jeon Yang, Sang Heon Lee +2 more	2016-12-13
9502218	RPS assisted RF plasma source for semiconductor processing	Saurabh Garg, Jang-Gyoo Yang	2016-11-22	$14,203,000
9449850	Processing systems and methods for halide scavenging	Anchuan Wang, Zihui Li, Hiroshi Hamana, Zhijun Chen, Ching-Mei Hsu +5 more	2016-09-20	$12,933,000
9384997	Dry-etch selectivity	He Ren, Jang-Gyoo Yang, Jonghoon Baek, Anchuan Wang, Soonam Park +2 more	2016-07-05	$10,411,000
9373517	Semiconductor processing with DC assisted RF power for improved control	Jang-Gyoo Yang, Soonam Park, Jonghoon Baek, Saurabh Garg, Shankar Venkataraman	2016-06-21	$17,194,000
9362130	Enhanced etching processes using remote plasma sources	Nitin K. Ingle, Dmitry Lubomirsky, Shankar Venkataraman	2016-06-07	$15,363,000
9267739	Pedestal with multi-zone temperature control and multiple purge capabilities	Jang-Gyoo Yang, Alexander Tam, Elisha Tam	2016-02-23	$9,765,000