Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524889 | Processing systems and apparatus adapted to process substrates in electronic device manufacturing | Paul B. Reuter, Eric A. Englhardt, Ganesh Balasubramanian, Xinglong Chen, JuanCarlos Rocha-Alvarez | 2016-12-20 |
| 9441792 | Transfer chamber gas purge apparatus, electronic device processing systems, and purge methods | Edward Ng, Eric A. Englhardt, Travis Morey, Ayan Majumdar | 2016-09-13 |