Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524889 | Processing systems and apparatus adapted to process substrates in electronic device manufacturing | Steve Hongkham, Paul B. Reuter, Eric A. Englhardt, Ganesh Balasubramanian, Xinglong Chen | 2016-12-20 |
| 9355876 | Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations | Paul B. Reuter, Ganesh Balasubramanian, Jeffrey Barrett Robinson, Dale R. Du Bois, Paul Connors | 2016-05-31 |