Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490154 | Method of aligning substrate-scale mask with substrate | Abraham Ravid, Todd Egan, Sergey Starik, Ganesh Balasubramanian | 2016-11-08 |
| 9355876 | Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations | Paul B. Reuter, Ganesh Balasubramanian, JuanCarlos Rocha-Alvarez, Jeffrey Barrett Robinson, Dale R. Du Bois | 2016-05-31 |