Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524889 | Processing systems and apparatus adapted to process substrates in electronic device manufacturing | Steve Hongkham, Paul B. Reuter, Eric A. Englhardt, Xinglong Chen, JuanCarlos Rocha-Alvarez | 2016-12-20 |
| 9518456 | Coiled tubing deployed gas injection mandrel | Yazid Mohamed Bashir, Bjorn Staale Varnes | 2016-12-13 |
| 9490154 | Method of aligning substrate-scale mask with substrate | Abraham Ravid, Todd Egan, Paul Connors, Sergey Starik | 2016-11-08 |
| 9458537 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2016-10-04 |
| 9390910 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2016-07-12 |
| 9355876 | Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations | Paul B. Reuter, JuanCarlos Rocha-Alvarez, Jeffrey Barrett Robinson, Dale R. Du Bois, Paul Connors | 2016-05-31 |
| 9337072 | Apparatus and method for substrate clamping in a plasma chamber | Amit Kumar BANSAL, Eller Y. Juco, Mohamad A. Ayoub, Hyung Joon Kim, Karthik Janakiraman +11 more | 2016-05-10 |