Todd Egan — 7 Patents at Applied Materials

Issued Patents 2016

Showing 1–7 of 7 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
9490154	Method of aligning substrate-scale mask with substrate	Abraham Ravid, Paul Connors, Sergey Starik, Ganesh Balasubramanian	2016-11-08	$17,585,000
9458537	PECVD process	Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more	2016-10-04	$14,162,000
9443714	Methods and apparatus for substrate edge cleaning	James M. Holden, Song-Moon Suh, Kalyanjit Ghosh, Leon Volfovski, Michael R. Rice +1 more	2016-09-13	$19,510,000
9429247	Acoustically-monitored semiconductor substrate processing systems and methods	Kommisetti Subrahmanyam, Joseph Yudovsky, Michael W. Johnson	2016-08-30	$23,980,000
9405287	Apparatus and method for optical calibration of wafer placement by a robot	Abraham Ravid, Eran Weiss, Michael R. Rice, Izya Kremerman	2016-08-02	$10,698,000
9335151	Film measurement	Edward W. Budiarto, Dmitry A. Dzilno	2016-05-10	$10,962,000
9252057	Laser and plasma etch wafer dicing with partial pre-curing of UV release dicing tape for film frame wafer application	Mohammad Kamruzzaman Chowdhury, Wei-Sheng Lei, Brad Eaton, Madhava Rao Yalamanchili, Ajay Kumar	2016-02-02	$8,701,000