Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490154 | Method of aligning substrate-scale mask with substrate | Abraham Ravid, Paul Connors, Sergey Starik, Ganesh Balasubramanian | 2016-11-08 |
| 9458537 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2016-10-04 |
| 9443714 | Methods and apparatus for substrate edge cleaning | James M. Holden, Song-Moon Suh, Kalyanjit Ghosh, Leon Volfovski, Michael R. Rice +1 more | 2016-09-13 |
| 9429247 | Acoustically-monitored semiconductor substrate processing systems and methods | Kommisetti Subrahmanyam, Joseph Yudovsky, Michael W. Johnson | 2016-08-30 |
| 9405287 | Apparatus and method for optical calibration of wafer placement by a robot | Abraham Ravid, Eran Weiss, Michael R. Rice, Izya Kremerman | 2016-08-02 |
| 9335151 | Film measurement | Edward W. Budiarto, Dmitry A. Dzilno | 2016-05-10 |
| 9252057 | Laser and plasma etch wafer dicing with partial pre-curing of UV release dicing tape for film frame wafer application | Mohammad Kamruzzaman Chowdhury, Wei-Sheng Lei, Brad Eaton, Madhava Rao Yalamanchili, Ajay Kumar | 2016-02-02 |