Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508612 | Method to detect wafer arcing in semiconductor manufacturing equipment | Scott Singlevich, Tony Davis, Michael W. Johnson | 2016-11-29 |
| 9429247 | Acoustically-monitored semiconductor substrate processing systems and methods | Todd Egan, Joseph Yudovsky, Michael W. Johnson | 2016-08-30 |