Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9465290 | Near-infrared absorbing film compositions | Martin Glodde, Dario L. Goldfarb, Wai-Kin Li, Sen Liu, Libor Vyklicky | 2016-10-11 |
| 9460934 | Wet strip process for an antireflective coating layer | Martin Glodde, Javier Perez, Takeshi Kinsho, Tsutomu Ogihara, Seiichiro Tachibana +1 more | 2016-10-04 |
| 9449822 | Method of forming semiconductor structures with contact holes | Wai-Kin Li, Joy Cheng, Kuang-Jung Chen | 2016-09-20 |
| 9348228 | Acid-strippable silicon-containing antireflective coating | Martin Glodde, Ratnam Sooriyakumaran | 2016-05-24 |
| 9337033 | Dielectric tone inversion materials | Martin Glodde, Hiroyuki Miyazoe, Ratnam Sooriyakumaran, HsinYu Tsai | 2016-05-10 |
| 9316916 | Method to mitigate resist pattern critical dimension variation in a double-exposure process | Kuang-Jung Chen, Wai-Kin Li | 2016-04-19 |
| 9281212 | Dielectric tone inversion materials | Martin Glodde, Hiroyuki Miyazoe, Ratnam Sooriyakumaran, HsinYu Tsai | 2016-03-08 |
| 9235119 | Exposure photolithography methods | Kuang-Jung Chen, Ranee W. Kwong, Sen Liu, Pushkara R. Varanasi | 2016-01-12 |